PFOTS SAM growth

PFOTS monolayer self-assembly on SiO2 layer, which is also true for Si wafer when there is a thin oxide layer on the surface.
Use photoresist to pattern the wafer surface since PFOTS will only self-assembly on exposed surface regions.

• No Water! And thus no acetone, isopropanol, methanol. Work in glove box.
• Soap photoresit patterned dry wafer in dodecane for 5 minute
• Add several drops of PFOTS in dodecane and stay for 5 minutes. During summer days when the humidity is high, increase this soap time to 20 minutes in order to achieve a fairly good result.
  
• Rinse in DI water, blow dry
• Use TCE (trichloroethylene) to wash the dish