ITO etch recipe

Sample preparation:
ITO glass patterned by photoresist with 110 C hard bake for 5-6 min

Etch solution: 10 DI water : 9 HCl : 1 HNO3
Temperature: 40-60 C, use hotplate

Etch time:
ITO thickness 150 nm, etch time is 3 min at 45 C
ITO thickness 80 nm, etch time is 2 min at 45 C
New ITO glass, etch time is 3 min 45 sec at 45 C

Check:
Use multimeter to check the glass resistance. When etch is done, the measured resistance should be infinite.

--from Ke Long